RMA06DTKN FFSD-10-D-21.65-01-N-D04 EFR32MG21A020F1024IM32-B HW-18-12-F-D-330-SM AX7DCF3-491.5200C QEFM252Q681J3NC001E QEFM252Q471K3NC001E DW-02-14-L-D-1165 387-036-521-104 DW-02-14-H-D-200