KXP94 Series
Accelerometers and Inclinometers
FEATURES
MARKETS
APPLICATIONS
Small Package - 5x5x1.2mm DFN
Multiplexed Analog Output
Internal 1KHz Low Pass Filter
Low Noise
Notebook and Ultra Mobile Personal Computers (UMPC)
Hard Disk Drive Protection
Screen Orientation
Personal Navigation Devices
Lead-free Solderability
Inertial Navigation & Dead Reckoning
Cell Phones and Handheld PDAs
Gesture Recognition
Excellent Temperature Performance
High Shock Survivability
Low Power Consumption
User Definable Bandwidth
Factory Programmable Offset and Sensitivity
Self-test Function
Cameras, Video Equipment & Personal Media Players
Inclination
Tilt Sensing
Free-fall Detection
Image Stabilization
Screen Orientation
Industrial
Vibration Analysis
Accident & Theft Prevention
Platform Stabilization Drill Orientation
PROPRIETARY TECHNOLOGY
These high-performance silicon micromachined linear accelerometers and
inclinometers consist of a sensor element and an ASIC packaged in a
5x5x1.2mm Dual Flat No-lead (DFN). The sensor element is fabricated from
single-crystal silicon with proprietary Deep Reactive Ion Etching (DRIE)
processes, and is protected from the environment by a hermetically-sealed
silicon cap at the wafer level.
The KXP94 series is designed to provide a high signal-to-noise ratio with
excellent performance over temperature. These sensors can accept supply
voltages between 2.5V and 5.25V. Sensitivity is factory programmable
allowing customization for applications requiring from ±1.5g to ±6.0g
ranges. Sensor bandwidth is user-definable.
The sensor element functions on the principle of differential capacitance.
Acceleration causes displacement of a silicon structure resulting in a
change in capacitance. An ASIC, using a standard CMOS manufacturing
process, detects and transforms changes in capacitance into an analog out-
put voltage, which is proportional to acceleration. The analog output is
also accessed through an on-board 4-channel multiplexer. The sense ele-
ment design utilizes common mode cancellation to decrease errors from
process variation and environmental stress.
36 Thornwood Dr. - Ithaca, NY 14850 USA tel: 607-257-1080 - fax: 607-257-1146 - www.kionix.com - info@kionix.com
“Kionix” is a registered trademark of Kionix, Inc. Products described herein are protected by patents issued or pending. Information provided
in this document is believed to be accurate and reliable but is not guaranteed. Kionix does not assume responsibility for its use or distribution.
No license is granted by implication or otherwise under any patent or other rights of Kionix. Kionix reserves the right to change product
specifications or discontinue this product at any time without prior notice.
© Kionix 2010 All Rights Reserved
July 27, 2010 Rev. 0.2
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