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KXTC9-3672

型号:

KXTC9-3672

品牌:

ROHM[ ROHM ]

页数:

13 页

PDF大小:

686 K

PART NUMBER:  
± 6g Tri-axis Analog  
Accelerometer Specifications  
KXTC9-3672  
Rev. 5  
Feb-2015  
Product Description  
The KXTC9-3672 is  
a
Tri-axis, silicon micromachined  
accelerometer with a full-scale output range of +/-6g (58.8 m/s/s).  
The sense element is fabricated using Kionix’s proprietary plasma  
micromachining process technology. Acceleration sensing is based  
on the principle of a differential capacitance arising from  
acceleration-induced motion of the sense element, which further  
utilizes common mode cancellation to decrease errors from  
process variation, temperature, and environmental stress. The  
sense element is hermetically sealed at the wafer level by bonding  
a second silicon lid wafer to the device using a glass frit. A  
separate ASIC device packaged with the sense element provides  
signal conditioning and self-test. The accelerometer is delivered in  
a 3 x 3 x 0.9mm Land Grid Array (LGA) plastic package operating  
from a 1.8 3.6V DC supply. The KXTC9 features a factory  
programmable low pass filter.  
There are 2 factory programmable modes of operation for the KXTC9:  
Mode 00 The Enable pin must be high for normal operation and low for power shutdown.  
Mode 01 The Enable pin must be low for normal operation and high for power shutdown.  
The KXTC9-3672 is factory programmed to be in MODE 00.  
36 Thornwood Dr. Ithaca, NY 14850  
tel: 607-257-1080 fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2015 Kionix All Rights Reserved  
694-4730:6142M-1502181628  
Page 1 of 13  
PART NUMBER:  
± 6g Tri-axis Analog  
Accelerometer Specifications  
KXTC9-3672  
Rev. 5  
Feb-2015  
Functional Diagram  
32K  
X
6
7
8
Output X  
Output Y  
Output Z  
Sensor  
Low  
Pass  
Filter  
32K  
32K  
Charge  
Amplifier  
Y
Sensor  
Z
Sensor  
Oscillator  
Vdd  
1
9
GND  
Logic  
3
4
ST  
Enable  
36 Thornwood Dr. Ithaca, NY 14850  
tel: 607-257-1080 fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2015 Kionix All Rights Reserved  
694-4730:6142M-1502181628  
Page 2 of 13  
PART NUMBER:  
± 6g Tri-axis Analog  
Accelerometer Specifications  
KXTC9-3672  
Rev. 5  
Feb-2015  
Product Specifications  
Table 1. Mechanical  
(specifications are for operation at 3.3V and T = 25C unless stated otherwise)  
Parameters  
Operating Temperature Range  
Zero-g Offset  
Units  
ºC  
Min  
-40  
Typical  
Max  
85  
-
V
1.622  
1.65  
1.678  
0.7 (xy)  
0.4 (z)  
220  
0.01 (xy)  
0.04 (z)  
Zero-g Offset Variation from RT over Temp.  
Sensitivity  
mg/ºC  
mV/g  
%/ºC  
%
213  
227  
Sensitivity Variation from RT over Temp.  
Offset Ratiometric Error (Vdd = 3.3V ± 5%)  
Sensitivity Ratiometric Error (Vdd = 3.3V ± 5%)  
0.2  
0.3 (xy)  
0.15 (z)  
2.5 (x)  
2.3 (y)  
2.1 (z)  
%
1.7  
1.5  
1.3  
3.3  
3.1  
2.9  
Self Test Output change on Activation  
Mechanical Resonance (-3dB)1  
g
3500 (xy)  
1800 (z)  
Hz  
Non-Linearity  
% of FS  
%
0.1  
2
Cross Axis Sensitivity  
Noise Density (on filter pins)  
125  
g / Hz  
Notes:  
1. Resonance as defined by the dampened mechanical sensor.  
36 Thornwood Dr. Ithaca, NY 14850  
tel: 607-257-1080 fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2015 Kionix All Rights Reserved  
694-4730:6142M-1502181628  
Page 3 of 13  
PART NUMBER:  
± 6g Tri-axis Analog  
Accelerometer Specifications  
KXTC9-3672  
Rev. 5  
Feb-2015  
Table 2. Electrical  
(specifications are for operation at 3.3V and T = 25C unless stated otherwise)  
Parameters  
Supply Voltage (Vdd) Operating  
Units  
V
Min  
1.8  
Typical  
3.3  
Max  
3.6  
Operating (full power)  
170  
240  
310  
A  
Current Consumption  
Standby  
5
A  
Analog Output Resistance(Rout  
Power Up Time1  
Bandwidth (-3dB)2  
)
24  
-
32  
40  
-
k  
ms  
Hz  
5*Rout*C  
1000  
800  
1200  
Notes:  
1. Power up time is determined by 5 times the RC time constant of the factory programmed or  
user defined low pass filter.  
2. Factory programmable to have a switched capacitor low pass filter at 2kHz, 1kHz, 500Hz,  
100Hz, 50Hz, or no low pass filter. Optionally, the user can define with external capacitors.  
Maximum defined by the frequency response of the sensors.  
36 Thornwood Dr. Ithaca, NY 14850  
tel: 607-257-1080 fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2015 Kionix All Rights Reserved  
694-4730:6142M-1502181628  
Page 4 of 13  
PART NUMBER:  
± 6g Tri-axis Analog  
Accelerometer Specifications  
KXTC9-3672  
Rev. 5  
Feb-2015  
Power-On Reset (POR)  
Proper functioning of power-on reset (POR) is dependent on the specific VDDLow and TVdd_Off profile of  
individual applications. It is recommended to minimize VDDLow and maximize TVdd_Off. To assure  
proper POR in all environmental conditions the application should be evaluated over the range of  
VDDLow, TVdd_Off and temperature as POR performance can vary depending on these parameters. It is  
also advised that the Rise or Fall be monotonic. Note that the outputs will not be stable until VDD has  
reached its final value.  
Specific application testing will likely demonstrate POR performance regions for a proper POR trigger.  
To assure POR trigger properly executes, setting operational thresholds consistent with Table 3 below  
is suggested.  
Example POR performance chart  
As can be seen in this example POR performance chart, the time and Voltage to activate POR is  
variable depending on the voltage and time as indicated by TVdd_Off max and min and VDDHigh and  
VDDLow  
.
36 Thornwood Dr. Ithaca, NY 14850  
tel: 607-257-1080 fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2015 Kionix All Rights Reserved  
694-4730:6142M-1502181628  
Page 5 of 13  
PART NUMBER:  
± 6g Tri-axis Analog  
Accelerometer Specifications  
KXTC9-3672  
Rev. 5  
Feb-2015  
Table 3. POR Example Performance  
Parameters  
Units  
Min  
Typical  
Max  
-40°C  
VDD rise time : TVdd  
VDD fall time : TVdd  
VDD off time : TVdd_Off  
ms  
ms  
ms  
mV  
mV  
5
5
25  
VDD High voltage : VDDHigh  
VDD low voltage : VDDLow  
250  
100  
25°C  
VDD rise time : TVdd  
ms  
ms  
ms  
mV  
mV  
5
5
VDD fall time : TVdd  
VDD off time : TVdd_Off  
VDD High voltage : VDDHigh  
VDD low voltage : VDDLow  
10  
600  
100  
85°C  
VDD rise time : TVdd  
ms  
ms  
ms  
mV  
mV  
5
5
VDD fall time : TVdd  
VDD off time : TVdd_Off  
VDD High voltage : VDDHigh  
VDD low voltage : VDDLow  
10  
600  
100  
Notes:  
1. VDD must always be monotonic ramps without ambiguous state.  
2. TVdd rise or fall from 10% to 90% of final value needs to be TVdd Max.  
3. In order to prevent the accelerometer from entering an ambiguous state, VDD needs to be  
pulled down to GND (VDDLow Min for a duration of time TVdd_Off Min)  
4. Power will be maintained if VDD does not go below VDDHigh Max.  
5. Between VDDHigh Max and VDDLow POR may occur.  
36 Thornwood Dr. Ithaca, NY 14850  
tel: 607-257-1080 fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2015 Kionix All Rights Reserved  
694-4730:6142M-1502181628  
Page 6 of 13  
PART NUMBER:  
± 6g Tri-axis Analog  
Accelerometer Specifications  
KXTC9-3672  
Rev. 5  
Feb-2015  
It is important the user determines the timing (TVdd_Off) and threshold (VDDLow) levels by evaluating the  
performance in the specific system for which the device will be incorporated.  
The data provided by Kionix is intended for initial customer design guidance only. Kionix POR testing  
looks at a finite number of test configurations. Each customer application will have varying input  
sensor parameters (electrical, mechanical, and environmental) that will be different than the  
configurations tested by Kionix. Each customer utilizing the sensor will need to properly validate the  
sensor (including POR function) within their application under their specific use cases to ensure it  
responds as required.  
36 Thornwood Dr. Ithaca, NY 14850  
tel: 607-257-1080 fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2015 Kionix All Rights Reserved  
694-4730:6142M-1502181628  
Page 7 of 13  
PART NUMBER:  
± 6g Tri-axis Analog  
Accelerometer Specifications  
KXTC9-3672  
Rev. 5  
Feb-2015  
Table 4. Environmental  
Parameters  
Units  
V
Min  
-0.3  
-40  
Typical  
Max  
6.0  
Supply Voltage (Vdd) Absolute Limits  
Operating Temperature Range  
Storage Temperature Range  
-
-
-
ºC  
85  
ºC  
-55  
150  
5000 for 0.5ms  
10000 for 0.2ms  
Mech. Shock (powered and unpowered)  
g
-
-
-
-
ESD  
HBM  
V
2000  
Caution: ESD Sensitive and Mechanical Shock Sensitive Component, improper handling  
can cause permanent damage to the device.  
This product conforms to Directive 2002/95/EC of the European Parliament and of the Council of the  
European Union (RoHS). Specifically, this product does not contain lead, mercury, cadmium,  
hexavalent chromium, polybrominated biphenyls (PBB), or polybrominated diphenyl ethers (PBDE)  
above the maximum concentration values (MCV) by weight in any of its homogenous materials.  
Homogenous materials are "of uniform composition throughout."  
This product is halogen-free per IEC 61249-2-21. Specifically, the materials used in this product  
contain a maximum total halogen content of 1500 ppm with less than 900-ppm bromine and less than  
900-ppm chlorine.  
HF  
Soldering  
Soldering recommendations are available upon request or from www.kionix.com.  
36 Thornwood Dr. Ithaca, NY 14850  
tel: 607-257-1080 fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2015 Kionix All Rights Reserved  
694-4730:6142M-1502181628  
Page 8 of 13  
PART NUMBER:  
± 6g Tri-axis Analog  
Accelerometer Specifications  
KXTC9-3672  
Rev. 5  
Feb-2015  
Application Schematic  
10  
1
2
3
4
Vdd  
C1  
9
Z
Y
8
C4  
KXTC9  
ST  
7
C3  
X
Enable  
6
5
C2  
Table 5. KXTC9 Pin Descriptions  
Pin  
1
Name  
Vdd  
Description  
The power supply input. Decouple this pin to ground with a 0.1uF ceramic capacitor (C1).  
2
Res  
Reserved Connect to Vdd or Ground  
3
4
5
ST  
Enable  
NC  
Self Test: Low - Normal operation; High - Device is in self-test mode. Connect to Ground if not used.  
Enable (1 = Normal Mode, 0 = Power Down Mode)  
Not Connected Internally may be connected to Vdd or Ground  
6
7
8
9
X Output  
Y Output  
Z Output  
GND  
Analog output of the x-channel. Optionally, a capacitor (C2) placed between this pin and ground will form a low pass filter.  
Analog output of the y-channel. Optionally, a capacitor (C3) placed between this pin and ground will form a low pass filter.  
Analog output of the z-channel. Optionally, a capacitor (C4) placed between this pin and ground will form a low pass filter.  
Ground  
10  
NC  
Not Connected Internally may be connected to Vdd or Ground  
Application Design Equations  
The bandwidth is determined by a factory programmable switched capacitor filter. The filter can be set at the  
factory to be 2kHz, 1kHz, 500Hz, 100Hz, 50Hz, or no low pass filter. Alternatively, bandwidth can be reduced  
by addition of a capacitor on the output pins 5, 6, and 7 according to the equation:  
4.97x106  
C2 C3 C4   
fBW  
36 Thornwood Dr. Ithaca, NY 14850  
tel: 607-257-1080 fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2015 Kionix All Rights Reserved  
694-4730:6142M-1502181628  
Page 9 of 13  
PART NUMBER:  
± 6g Tri-axis Analog  
Accelerometer Specifications  
KXTC9-3672  
Rev. 5  
Feb-2015  
Test Specifications  
!
Special Characteristics:  
These characteristics have been identified as being critical to the customer. Every part is tested to verify its  
conformance to specification prior to shipment.  
Table 6. Test Specifications  
Parameter  
Zero-g Offset @ RT  
Sensitivity @ RT  
Specification  
1.65 +/- 0.0275 V  
220 +/- 6.6 mV/g  
Test Conditions  
25C, Vdd = 3.3 V  
25C, Vdd = 3.3 V  
Current Consumption -- Operating 170 <= Idd <= 310 uA 25C, Vdd = 3.3 V  
36 Thornwood Dr. Ithaca, NY 14850  
tel: 607-257-1080 fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2015 Kionix All Rights Reserved  
694-4730:6142M-1502181628  
Page 10 of 13  
PART NUMBER:  
± 6g Tri-axis Analog  
Accelerometer Specifications  
KXTC9-3672  
Rev. 5  
Feb-2015  
Package Dimensions and Orientation  
3 x 3 x 0.9 mm LGA  
All dimensions and tolerances conform to ASME Y14.5M-1994  
36 Thornwood Dr. Ithaca, NY 14850  
tel: 607-257-1080 fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2015 Kionix All Rights Reserved  
694-4730:6142M-1502181628  
Page 11 of 13  
PART NUMBER:  
± 6g Tri-axis Analog  
Accelerometer Specifications  
KXTC9-3672  
Rev. 5  
Feb-2015  
Static X/Y/Z Output Response versus Orientation to Earth’s surface (1-g):  
Position  
1
2
3
4
5
6
Diagram  
Top  
Bottom  
Bottom  
Top  
X
Y
Z
1.65 V  
1.87 V  
1.65 V  
1.87 V  
1.65 V  
1.65 V  
1.65 V  
1.43 V  
1.65 V  
1.43 V  
1.65 V  
1.65 V  
1.65 V  
1.65 V  
1.87 V  
1.65 V  
1.65 V  
1.43 V  
X-Polarity  
Y-Polarity  
Z-Polarity  
0
+
0
+
0
0
0
-
0
-
0
0
0
0
+
0
0
-
(1-g)  
Earth’s Surface  
36 Thornwood Dr. Ithaca, NY 14850  
tel: 607-257-1080 fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2015 Kionix All Rights Reserved  
694-4730:6142M-1502181628  
Page 12 of 13  
PART NUMBER:  
± 6g Tri-axis Analog  
Accelerometer Specifications  
KXTC9-3672  
Rev. 5  
Feb-2015  
Revision History  
REVISION DESCRIPTION  
DATE  
1
2
3
4
5
Initial product release  
Updated self test values  
Inserted min and max self-test values  
Updated filter setting from 50 Hz to 1 kHz 01-Jun-2012  
Include POR description 25-Feb-2015  
14-Mar-2011  
15-May-2012  
21-May-2012  
"Kionix" is a registered trademark of Kionix, Inc. Products described herein are protected by patents issued or pending. No license is granted by implication or otherwise  
under any patent or other rights of Kionix. The information contained herein is believed to be accurate and reliable but is not guaranteed. Kionix does not assume  
responsibility for its use or distribution. Kionix also reserves the right to change product specifications or discontinue this product at any time without prior notice. This  
publication supersedes and replaces all information previously supplied.  
36 Thornwood Dr. Ithaca, NY 14850  
tel: 607-257-1080 fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2015 Kionix All Rights Reserved  
694-4730:6142M-1502181628  
Page 13 of 13  
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