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KXR94-1050

型号:

KXR94-1050

描述:

2克三轴加速度计产品规格[ 2g Tri-axis Accelerometer Specifications ]

品牌:

ETC[ ETC ]

页数:

13 页

PDF大小:

320 K

PART NUMBER:  
± 2g Tri-axis Accelerometer  
Specifications  
KXR94-1050  
Rev. 2  
Aug-2010  
Product Description  
The KXR94-1050 is a Tri-axis, silicon micromachined accelerometer with a full-scale output  
range of +/-2g (19.6 m/s/s). The sense element is fabricated using Kionix’s proprietary plasma  
micromachining process technology. Acceleration sensing is based on the principle of a  
differential capacitance arising from acceleration-induced motion of the sense element, which  
further utilizes common mode cancellation to decrease errors from process variation,  
temperature, and environmental stress. The sense element is hermetically sealed at the wafer  
level by bonding a second silicon lid wafer to the device using a glass frit. A separate ASIC  
device packaged with the sense element provides signal conditioning and self-test. The  
accelerometer is delivered in a 5 x 5 x 1.2 mm DFN plastic package operating from a 2.5 –  
5.25V DC supply.  
There are 4 factory programmable modes of operation for the KXR94:  
Mode 00 The three outputs (X, Y, Z) are read through the digital SPI interface, which is also  
used to command Selftest and Standby Mode. The digital I/O pads are powered  
from a separate power pin, and will interface to 1.8V logic.  
Mode 01 The three outputs (X, Y, Z) are provided on three analog output pins. The KXR94  
also features an integrated 3-channel multiplexer (X, Y, Z). The Enable pin must  
be high for normal operation and low for power shutdown.  
Mode 10 The three outputs (X, Y, Z) are provided on three analog output pins. The KXR94  
also features an integrated 4-channel multiplexer (X, Y, Z, Aux In). The Enable  
pin must be high for normal operation and low for power shutdown.  
Mode 11 The three outputs (X, Y, Z) are provided on three analog output pins. The KXR94  
also features an integrated 4-channel multiplexer (X, Y, Z, Aux In). The Enable  
pin must be low for normal operation and high for power shutdown.  
The KXR94-1050 is factory programmed to be in MODE 10.  
36 Thornwood Dr. Ithaca, NY 14850  
tel: 607-257-1080 fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2010 Kionix All Rights Reserved  
323-1672-1008100655  
Page 1 of 12  
PART NUMBER:  
± 2g Tri-axis Accelerometer  
Specifications  
KXR94-1050  
Rev. 2  
Aug-2010  
Functional Diagram  
Output X  
C2  
Charge  
Amplifier  
32K  
X
2
Sensor  
Self  
Test  
Temp  
Sensor  
10  
Y
Output Y  
13  
32K  
32K  
Charge  
Amplifier  
1kHz  
LPF  
Sensor  
C3  
Output Z  
Z
Charge  
Amplifier  
14  
Sensor  
C4  
Oscillator  
8
12  
3
Vdd  
GND  
GND  
Mux  
7
4
Aux In  
Logic  
9
11  
5
6
Vmux  
S0 S1  
Enable NC  
36 Thornwood Dr. Ithaca, NY 14850  
tel: 607-257-1080 fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2010 Kionix All Rights Reserved  
323-1672-1008100655  
Page 2 of 12  
PART NUMBER:  
± 2g Tri-axis Accelerometer  
Specifications  
KXR94-1050  
Rev. 2  
Aug-2010  
Product Specifications  
Table 1. Mechanical  
(specifications are for operation at 2.8V and T = 25C unless stated otherwise)  
Parameters  
Operating Temperature Range  
Zero-g Offset  
Units  
ºC  
Min  
-40  
Typical  
Max  
85  
-
V
1.358  
1.4  
0.2  
560  
1.442  
Zero-g Offset Variation from RT over Temp.  
Sensitivity  
mg/ºC  
mV/g  
549  
571  
0.01 (xy)  
0.02 (z)  
Sensitivity Variation from RT over Temp.  
Offset Ratiometric Error (Vdd = 2.8V ± 5%)  
Sensitivity Ratiometric Error (Vdd = 2.8V ± 5%)  
%/ºC  
mg  
%
4
1.25 (xy)  
0.2 (z)  
Non-Linearity  
% of FS  
%
0.1  
2
Cross Axis Sensitivity  
1.3 (xy)  
0.35 (z)  
800  
45  
Self Test Output change on Activation  
g
Bandwidth (-3dB)1  
Hz  
640  
960  
Noise Density (on filter pins)  
g / Hz  
Notes:  
1. Internal 1 kHz low pass filter. Lower frequencies are user definable with external capacitors.  
36 Thornwood Dr. Ithaca, NY 14850  
tel: 607-257-1080 fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2010 Kionix All Rights Reserved  
323-1672-1008100655  
Page 3 of 12  
PART NUMBER:  
± 2g Tri-axis Accelerometer  
Specifications  
KXR94-1050  
Rev. 2  
Aug-2010  
Table 2. Electrical  
(specifications are for operation at 2.8V and T = 25C unless stated otherwise)  
Parameters  
Supply Voltage (Vdd) Operating  
Units  
V
Min  
2.5  
Typical  
Max  
5.25  
1400  
5
2.8  
950  
-
Operating  
Current Consumption  
Standby  
500  
A  
A  
k  
V
Analog Output Resistance(Rout  
)
24  
-
32  
-
40  
Input Low Voltage  
0.2 * VIO  
-
Input High Voltage  
V
0.8 * VIO  
-
Multiplexer Response Time  
Power Up Time1  
4.5  
1
s  
ms  
Notes:  
1. Power up time can also be determined by 5 times the RC time constant of the optional user  
defined low pass filter.  
36 Thornwood Dr. Ithaca, NY 14850  
tel: 607-257-1080 fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2010 Kionix All Rights Reserved  
323-1672-1008100655  
Page 4 of 12  
PART NUMBER:  
± 2g Tri-axis Accelerometer  
Specifications  
KXR94-1050  
Rev. 2  
Aug-2010  
Table 3. Environmental  
Parameters  
Supply Voltage (Vdd) Absolute Limits  
Units  
Min  
-0.3  
-40  
-55  
-
Target  
Max  
7.0  
V
ºC  
ºC  
g
-
-
-
-
-
Maximum Operating Temperature Range  
Storage Temperature Range  
125  
150  
Mech. Shock (powered and unpowered)  
5000 for 0.5ms  
3000  
ESD  
HBM  
V
-
Caution: ESD Sensitive and Mechanical Shock Sensitive Component, improper handling  
can cause permanent damage to the device.  
This product conforms to Directive 2002/95/EC of the European Parliament and of the  
Council of the European Union (RoHS). Specifically, this product does not contain lead,  
mercury, cadmium, hexavalent chromium, polybrominated biphenyls (PBB), or  
polybrominated diphenyl ethers (PBDE) above the maximum concentration values (MCV)  
by weight in any of its homogenous materials. Homogenous materials are "of uniform  
composition throughout."  
This product is halogen-free per IEC 61249-2-21. Specifically, the materials used in this  
HF product contain a maximum total halogen content of 1500 ppm with less than 900-ppm  
bromine and less than 900-ppm chlorine.  
Soldering  
Soldering recommendations available upon request or from www.kionix.com.  
36 Thornwood Dr. Ithaca, NY 14850  
tel: 607-257-1080 fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2010 Kionix All Rights Reserved  
323-1672-1008100655  
Page 5 of 12  
PART NUMBER:  
± 2g Tri-axis Accelerometer  
Specifications  
KXR94-1050  
Rev. 2  
Aug-2010  
Application Schematic  
1
2
3
4
5
6
7
14  
13  
12  
11  
10  
9
Z
Y
X
C2  
C3  
C4  
KXR94  
Aux In  
Vmux  
S0  
ST  
Enable  
Vdd  
8
S1  
C1  
Table 4. KXR94 Pad Descriptions  
Pad  
1
Name  
NC  
Description  
Not Connected Internally (can be connected to Vdd or Gnd)  
Analog output of the x-channel. Optionally, a capacitor (C2) placed between this pin and ground will form a  
low pass filter.  
2
X output  
3
4
5
6
7
8
9
10  
11  
12  
GND  
Aux In  
Vmux  
S0  
S1  
Vdd  
Enable  
ST  
NC  
Ground  
Auxiliary input for multiplexer. Connect to Vdd or Ground if not used.  
Multiplexed analog output. Do not connect if multiplexer is not used.  
MUX selector 0 (See Output Select Table). Connect to Vdd or Ground if not used.  
MUX selector 1 (See Output Select Table). Connect to Vdd or Ground if not used.  
The power supply input. Decouple this pin to ground with a 0.1uF ceramic capacitor (C1).  
Enable: High - Normal operation; Low - Device is in standby, power down mode  
Self Test: Low Normal operation; High Device is in self-test mode  
Not Connected Internally (can be connected to Vdd or Gnd)  
Ground  
GND  
Analog output of y-channel. Optionally, a capacitor (C3) placed between this pin and ground will form a low  
pass filter.  
Analog output of z-channel. Optionally, a capacitor (C4) placed between this pin and ground will form a low  
pass filter.  
13  
14  
Y Output  
Z Output  
Center pad Ground  
36 Thornwood Dr. Ithaca, NY 14850  
tel: 607-257-1080 fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2010 Kionix All Rights Reserved  
323-1672-1008100655  
Page 6 of 12  
PART NUMBER:  
± 2g Tri-axis Accelerometer  
Specifications  
KXR94-1050  
Rev. 2  
Aug-2010  
Application Design Equations  
1. The bandwidth is determined by the internal 1kHz low pass filter. The user can lower the  
bandwidth by placing filter capacitors connected from pins 2, 13 and 14 to ground. The  
response is single pole. Given a desired bandwidth, fBW, the filter capacitors are determined by:  
4.97x106  
C2 C3 C4   
fBW  
2. When using not using the multiplexer, the KXR94 is a pin-compatible replacement for Kionix’s  
KXM52 series of accelerometers. The following application schematic should be used:  
Pin 4 (Aux in) = Ground  
Pin 5 (Vmux) = Do Not Connect  
Pin 6 (S0)  
Pin 7 (S1)  
= Ground  
= Ground  
1
2
3
4
5
6
7
14  
13  
12  
11  
10  
9
Z
Y
X
C3  
C2  
C4  
KXR94  
ST  
Enable  
Vdd  
8
C1  
3. When not connecting the self test pin to a digital I/O port of a microcontroller, Kionix  
recommends connecting the self test pin to ground.  
36 Thornwood Dr. Ithaca, NY 14850  
tel: 607-257-1080 fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2010 Kionix All Rights Reserved  
323-1672-1008100655  
Page 7 of 12  
PART NUMBER:  
± 2g Tri-axis Accelerometer  
Specifications  
KXR94-1050  
Rev. 2  
Aug-2010  
USING THE MULTIPLEXED OUTPUT OF THE KXR94  
Multiplexer Data Select  
The KXR94 features an integrated 4-channel multiplexer. This feature reduces system MCU  
requirements to only 1 ADC and 2 digital I/O’s. The KXR94 uses two select inputs (S0, S1) to  
control the data flow from Vmux. When a microprocessor toggles the select inputs, the desired  
output is attained based on the select table. Note that logic 0 is GND and logic 1 is Vdd.  
S1  
0
0
1
1
S0  
0
1
0
1
Vmux  
X Output  
Z Output  
Y Output  
Aux. In  
Output Select Table  
Data Sampling Rate  
When operating in its multiplexed mode, the KXR94 has the ability to achieve very high data  
sampling rates. Internally, the sensor elements (X, Y, and Z) are sequentially sampled in a  
“round robin” fashion at a rate of 32kHz per axis. Note that this is a differential capacitance  
sampling of each sensor element, which stores an analog voltage on the filter cap for each axis.  
Combine this high sensor element sampling rate with the short 5µs settling time of the  
integrated multiplexer, and the user can achieve a performance very close to that of the 3  
separate analog outputs. This is more than sufficient to eliminate any aliasing in the final  
application since the KXR94 will be operating with a typical bandwidth of ~50Hz and a  
maximum of 1000Hz.  
36 Thornwood Dr. Ithaca, NY 14850  
tel: 607-257-1080 fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2010 Kionix All Rights Reserved  
323-1672-1008100655  
Page 8 of 12  
PART NUMBER:  
± 2g Tri-axis Accelerometer  
Specifications  
KXR94-1050  
Rev. 2  
Aug-2010  
Test Specifications  
!
Special Characteristics:  
These characteristics have been identified as being critical to the customer. Every part is tested to  
verify its conformance to specification prior to shipment.  
Table 5. Test Specifications  
Parameter  
Zero-g Offset @ RT  
Sensitivity @ RT  
Specification  
1.4 +/- 0.042 V  
560 +/- 11 mV/g  
Test Conditions  
25C, Vdd = 2.8 V  
25C, Vdd = 2.8 V  
500 <= Idd <= 1400 uA 25C, Vdd = 2.8 V  
Current Consumption -- Operating  
36 Thornwood Dr. Ithaca, NY 14850  
tel: 607-257-1080 fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2010 Kionix All Rights Reserved  
323-1672-1008100655  
Page 9 of 12  
PART NUMBER:  
± 2g Tri-axis Accelerometer  
Specifications  
KXR94-1050  
Rev. 2  
Aug-2010  
Package Dimensions and Orientation  
5 x 5 x 1.2 mm DFN  
+Y  
+X  
+Z  
+Z  
+X  
mm  
Nom  
5.00  
5.00  
1.20  
0.23  
0.50  
0.40  
3.60  
4.30  
inch  
Nom  
0.197  
0.197  
Dimension  
Min  
Max  
Min  
Max  
A
B
C
D
E
F
1.10  
0.18  
1.30  
0.28  
0.043 0.047 0.051  
0.007 0.009 0.011  
0.020  
0.014 0.016 0.018  
0.138 0.142 0.146  
0.165 0.169 0.173  
0.35  
3.50  
4.20  
0.45  
3.70  
4.40  
G
H
All dimensions and tolerances conform to ASME Y14.5M-1994  
36 Thornwood Dr. Ithaca, NY 14850  
tel: 607-257-1080 fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2010 Kionix All Rights Reserved  
323-1672-1008100655  
Page 10 of 12  
PART NUMBER:  
± 2g Tri-axis Accelerometer  
Specifications  
KXR94-1050  
Rev. 2  
Aug-2010  
Static X/Y/Z Output Response versus Orientation to Earth’s surface (1g):  
Position  
1
2
3
4
5
6
Diagram  
Top  
Bottom  
Bottom  
Top  
X
Y
Z
1.4 V  
1.96 V  
1.4 V  
1.96 V  
1.4 V  
1.4 V  
1.4 V  
0.84 V  
1.4 V  
0.84 V  
1.4 V  
1.4 V  
1.4 V  
1.4 V  
1.96 V  
1.4 V  
1.4 V  
0.84 V  
X-Polarity  
Y-Polarity  
Z-Polarity  
0
+
0
+
0
0
0
-
0
-
0
0
0
0
+
0
0
-
(1g)  
Earth’s Surface  
36 Thornwood Dr. Ithaca, NY 14850  
tel: 607-257-1080 fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2010 Kionix All Rights Reserved  
323-1672-1008100655  
Page 11 of 12  
PART NUMBER:  
± 2g Tri-axis Accelerometer  
Specifications  
KXR94-1050  
Rev. 2  
Aug-2010  
Revision History  
REVISION DESCRIPTION  
DATE  
06-Aug-  
2007  
1
Initial release  
2
Corrected typographic error in Table 2 (Typical operating voltage changed from 3.3 10-Aug-  
to 2.8V) 2010  
"Kionix" is a registered trademark of Kionix, Inc. Products described herein are protected by patents issued or pending. No license is granted by implication or otherwise  
under any patent or other rights of Kionix. The information contained herein is believed to be accurate and reliable but is not guaranteed. Kionix does not assume  
responsibility for its use or distribution. Kionix also reserves the right to change product specifications or discontinue this product at any time without prior notice. This  
publication supersedes and replaces all information previously supplied.  
36 Thornwood Dr. Ithaca, NY 14850  
tel: 607-257-1080 fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2010 Kionix All Rights Reserved  
323-1672-1008100655  
Page 12 of 12  
Mouser Electronics  
Authorized Distributor  
Click to View Pricing, Inventory, Delivery & Lifecycle Information:  
Kionix:  
KXR94-1050  
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