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KXR94-2283

型号:

KXR94-2283

描述:

2克三轴加速度计产品规格[ 2g Tri-Axis Accelerometer Specifications ]

品牌:

ETC[ ETC ]

页数:

10 页

PDF大小:

149 K

PART NUMBER:  
KXR94-2283  
± 2g Tri-Axis Accelerometer  
Specifications  
Rev. -  
July 2009  
Product Description  
The KXR94-2283 is a tri-axis, silicon micromachined accelerometer with a full-scale output range of  
±2g (19.6m/s2). The sense element is fabricated using Kionix’s proprietary plasma micromachining  
process technology. Acceleration sensing is based on the principle of a differential capacitance  
arising from acceleration-induced motion of the sense element, which further utilizes common mode  
cancellation to decrease errors from process variation, temperature, and environmental stress. The  
sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the  
device using a glass frit. A separate ASIC device packaged with the sense element provides signal  
conditioning and self-test. The accelerometer is delivered in a 5 x 5 x 1.2 mm DFN plastic package  
operating from a 2.5 – 5.25V DC supply.  
The three outputs (X, Y, Z) are provided on three analog output pins. The KXR94 also features an  
integrated 4-channel multiplexer (X, Y, Z, Aux In). The Enable pin must be high for normal  
operation and low for power shutdown.  
Functional Diagram  
Output X  
C2  
Charge  
Amplifier  
32K  
X
2
Sensor  
Self  
Test  
Temp  
Sensor  
10  
Y
Output Y  
13  
32K  
32K  
Charge  
Amplifier  
1kHz  
LPF  
Sensor  
C3  
Output Z  
Z
Charge  
Amplifier  
14  
Sensor  
C4  
Oscillator  
8
12  
3
Vdd  
GND  
GND  
Mux  
7
4
Aux In  
Logic  
9
11  
5
6
Vmux  
S0 S1  
Enable NC  
Page 1 of 9  
PART NUMBER:  
KXR94-2283  
± 2g Tri-Axis Accelerometer  
Specifications  
Rev. -  
July 2009  
Product Specifications  
Table 1. Mechanical  
(specifications are for operation at Vdd = 5.0 V and T = 25ºC unless stated otherwise)  
Parameters  
Operating Temperature Range  
Zero-g Offset  
Units  
ºC  
Min  
-40  
Typical  
-
Max  
85  
V
2.42  
2.50  
±0.2  
1000  
2.58  
Zero-g Offset Variation from RT over Temp.  
Sensitivity  
mg/ºC  
mV/g  
970  
1030  
±0.01 (xy)  
±0.02 (z)  
Sensitivity Variation from RT over Temp.  
Offset Ratiometric Error (Vdd = 5.0V ± 5%)  
Sensitivity Ratiometric Error (Vdd = 5.0V ± 5%)  
%/ºC  
mg  
%
±4  
±1.25 (xy)  
±0.20 (z)  
Non-Linearity  
% of FS  
%
0.1  
2.0  
Cross Axis Sensitivity  
4.4 (xy)  
1.25 (z)  
800  
45  
Self Test Output change on Activation  
g
Bandwidth (-3dB)1  
Hz  
Noise Density (on filter pins)  
µg / Hz  
Notes:  
1. Internal 1 kHz low pass filter. Lower frequencies are user definable with external  
capacitors.  
Table 2. Electrical  
(specifications are for operation at Vdd = 5.0 V and T = 25ºC unless stated otherwise)  
Parameters  
Supply Voltage (Vdd) Operating  
Units  
V
Min  
2.5  
Typical  
Max  
5.25  
1.40  
5
5.0  
0.95  
-
Operating  
Current Consumption  
Standby  
mA  
µA  
kΩ  
V
0.50  
-
Analog Output Resistance(Rout  
Input Low Voltage  
)
24  
-
32  
-
40  
0.2 * VIO  
-
Input High Voltage  
V
0.8 * VIO  
-
Multiplexer Response Time  
Power Up Time1  
4.5  
1
µs  
ms  
Notes:  
1. Power up time can also be determined by 5 times the RC time constant of the optional  
user defined low pass filter.  
Page 2 of 9  
PART NUMBER:  
KXR94-2283  
± 2g Tri-Axis Accelerometer  
Specifications  
Rev. -  
July 2009  
Table 3. Environmental  
Parameters  
Units  
Min  
-0.3  
-40  
-55  
-
Target  
Max  
7.0  
Supply Voltage (Vdd) Absolute Limits  
Maximum Operating Temperature Range  
Storage Temperature Range  
V
ºC  
ºC  
g
-
-
-
-
-
125  
150  
Mech. Shock (powered and unpowered)  
5000 for 0.5ms  
3000  
ESD  
HBM  
V
-
Caution: ESD Sensitive and Mechanical Shock Sensitive Component, improper handling can  
cause permanent damage to the device.  
The LGA plastic package conforms to European Union Directive 2002/95/EC on the restriction  
of the use of certain hazardous substances in electrical and electronic equipment (RoHS).  
Soldering  
Soldering recommendations available upon request or from www.kionix.com.  
Page 3 of 9  
PART NUMBER:  
KXR94-2283  
± 2g Tri-Axis Accelerometer  
Specifications  
Rev. -  
July 2009  
Application Schematic  
1
2
3
4
5
6
7
14  
13  
12  
11  
10  
9
Z
Y
X
C2  
C3  
C4  
KXR94  
Aux In  
Vmux  
S0  
ST  
Enable  
Vdd  
8
S1  
C1  
Table 4. KXR94 Pad Descriptions  
Pad Name  
Description  
1
2
NC  
X output  
GND  
Not Connected Internally (can be connected to Vdd or Gnd)  
Analog output of the x-channel. Optionally, a capacitor (C2) placed between this pin and ground will form a low pass filter.  
Ground  
3
4
5
6
7
8
9
10  
11  
12  
13  
14  
Aux In  
Vmux  
S0  
S1  
Vdd  
Enable  
ST  
NC  
Auxiliary input for multiplexer. Connect to Vdd or Ground if not used.  
Multiplexed analog output. Do not connect if multiplexer is not used.  
MUX selector 0 (See Output Select Table). Connect to Vdd or Ground if not used.  
MUX selector 1 (See Output Select Table). Connect to Vdd or Ground if not used.  
The power supply input. Decouple this pin to ground with a 0.1uF ceramic capacitor (C1).  
Enable: High - Normal operation; Low - Device is in standby, power down mode  
Self Test: Low – Normal operation; High – Device is in self-test mode  
Not Connected Internally (can be connected to Vdd or Gnd)  
GND  
Ground  
Y Output  
Z Output  
Center pad  
Analog output of y-channel. Optionally, a capacitor (C3)placed between this pin and ground will form a low pass filter.  
Analog output of z-channel. Optionally, a capacitor (C4) placed between this pin and ground will form a low pass filter.  
Ground  
Page 4 of 9  
PART NUMBER:  
KXR94-2283  
± 2g Tri-Axis Accelerometer  
Specifications  
Rev. -  
July 2009  
Application Design Equations  
1. The bandwidth is determined by the internal 1kHz low pass filter. The user can lower the bandwidth  
by placing filter capacitors connected from pins 2, 13 and 14 to ground. The response is single pole.  
Given a desired bandwidth, fBW, the filter capacitors are determined by:  
4.97x106  
C2 = C3 = C4 =  
fBW  
2. When using not using the multiplexer, the KXR94 is a pin-compatible replacement for Kionix’s  
KXM52 series of accelerometers. The following application schematic should be used:  
Pin 4 (Aux in) = Ground  
Pin 5 (Vmux) = Do Not Connect  
Pin 6 (S0)  
Pin 7 (S1)  
= Ground  
= Ground  
1
2
3
4
5
6
7
14  
13  
12  
11  
10  
9
Z
Y
X
C3  
C2  
C4  
KXR94  
ST  
Enable  
Vdd  
8
C1  
3. When not connecting the self test pin to a digital I/O port of a microcontroller, Kionix recommends  
connecting the self test pin to ground.  
Page 5 of 9  
PART NUMBER:  
KXR94-2283  
± 2g Tri-Axis Accelerometer  
Specifications  
Rev. -  
July 2009  
USING THE MULTIPLEXED OUTPUT OF THE KXR94  
Multiplexer Data Select  
The KXR94 features an integrated 4-channel multiplexer. This feature reduces system MCU  
requirements to only 1 ADC and 2 digital I/O’s. The KXR94 uses two select inputs (S0, S1) to  
control the data flow from Vmux. When a microprocessor toggles the select inputs, the desired  
output is attained based on the select table. Note that logic 0 is GND and logic 1 is Vdd.  
S1  
0
0
1
1
S0  
0
1
0
1
Vmux  
X Output  
Z Output  
Y Output  
Aux. In  
Output Select Table  
Data Sampling Rate  
When operating in its multiplexed mode, the KXR94 has the ability to achieve very high data  
sampling rates. Internally, the sensor elements (X, Y, and Z) are sequentially sampled in a “round  
robin” fashion at a rate of 32KHz per axis. Note that this is a differential capacitance sampling of  
each sensor element, which stores an analog voltage on the filter cap for each axis. Combine this  
high sensor element sampling rate with the short 5µS settling time of the integrated multiplexer, and  
the user can achieve a performance very close to that of the 3 separate analog outputs. This is  
more than sufficient to eliminate any aliasing in the final application since the KXR94 will be  
operating with a typical bandwidth of ~50Hz and a maximum of 1000Hz.  
Page 6 of 9  
PART NUMBER:  
KXR94-2283  
± 2g Tri-Axis Accelerometer  
Specifications  
Rev. -  
July 2009  
Test Specifications  
!
Special Characteristics:  
These characteristics have been identified as being critical to the customer. Every part is tested to verify  
its conformance to specification prior to shipment.  
Table 5. Test Specifications  
Parameter  
Zero-g Offset @ RT  
Frequency  
100%  
Test Conditions  
25ºC, Vdd = 5.0V  
25ºC, Vdd = 5.0V  
25ºC, Vdd = 5.0V  
Sensitivity @ RT  
100%  
Current Consumption Operating  
100%  
Page 7 of 9  
PART NUMBER:  
KXR94-2283  
± 2g Tri-Axis Accelerometer  
Specifications  
Rev. -  
July 2009  
Package Dimensions and Orientation  
5 x 5 x 1.2 mm DFN  
+Y  
+X  
+Z  
+Z  
+X  
mm  
Nom  
5.00  
5.00  
1.20  
0.23  
0.50  
0.40  
3.60  
4.30  
inch  
Nom  
0.197  
0.197  
Dimension  
Min  
Max  
Min  
Max  
A
B
C
D
E
F
1.10  
0.18  
1.30  
0.28  
0.043 0.047 0.051  
0.007 0.009 0.011  
0.020  
0.014 0.016 0.018  
0.138 0.142 0.146  
0.165 0.169 0.173  
0.35  
3.50  
4.20  
0.45  
3.70  
4.40  
G
H
All dimensions and tolerances conform to ASME Y14.5M-1994  
Page 8 of 9  
PART NUMBER:  
KXR94-2283  
± 2g Tri-Axis Accelerometer  
Specifications  
Rev. -  
July 2009  
Static X/Y/Z Output Response versus Orientation to Earth’s surface (1g):  
Position  
1
2
3
4
5
6
Diagram  
Top  
Bottom  
Bottom  
Top  
X
Y
Z
2.5 V  
3.5 V  
2.5 V  
3.5 V  
2.5 V  
2.5 V  
2.5 V  
1.5 V  
2.5 V  
1.5 V  
2.5 V  
2.5 V  
2.5 V  
2.5 V  
3.5 V  
2.5 V  
2.5 V  
1.5 V  
X-Polarity  
Y-Polarity  
Z-Polarity  
0
+
0
+
0
0
0
-
0
-
0
0
0
0
+
0
0
-
(1g)  
Earth’s Surface  
Page 9 of 9  
Mouser Electronics  
Authorized Distributor  
Click to View Pricing, Inventory, Delivery & Lifecycle Information:  
Kionix:  
KXR94-2283  
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