KXR94 Series
Accelerometers and Inclinometers
FEATURES
MARKETS
APPLICATIONS
Small Package - 5x5x1.2mm DFN
Multiplexed Analog or Digital SPI Interface
Internal 1KHz Low Pass Filter
Low Noise
Automotive
\\
Stability Control
Telematics/GPS
Lead-free Solderability
Theft and Accident Alarms
Excellent Temperature Performance
High Shock Survivability
Personal Navigation Devices
Inertial Navigation and Dead Reckoning
Low Power Consumption
Cell Phones and Handheld PDAs
User Definable Bandwidth
Factory Programmable Offset and Sensitivity
Self-test Function
Gesture Recognition
Cameras and Video Equipment
Image Stabilization
Industrial
Platform Stabilization
Drill Orientation
PROPRIETARY TECHNOLOGY
These high-performance silicon micromachined linear accelerometers and
inclinometers consist of a sensor element and an ASIC packaged in a
5x5x1.2mm Dual Flat No-lead (DFN). The sensor element is fabricated from
single-crystal silicon with proprietary Deep Reactive Ion Etching (DRIE)
processes, and is protected from the environment by a hermetically-sealed
silicon cap at the wafer level.
The KXR94 series is designed to provide a high signal-to-noise ratio with
integrated temperature compensation that provides excellent performance
over temperature. These sensors can accept supply voltages between 2.5V
and 5.25V. Sensitivity is factory programmable allowing customization for
applications requiring from ±1.0g to ±4.0g ranges. Sensor bandwidth is
user-definable.
The sensor element functions on the principle of differential capacitance.
Acceleration causes displacement of a silicon structure resulting in a
change in capacitance. An ASIC, using a standard CMOS manufacturing
process, detects and transforms changes in capacitance into an analog out-
put voltage, which is proportional to acceleration. The sense element de-
sign utilizes common mode cancellation to decrease errors from process
variation and environmental stress. Available in analog and multiplexed
analog outputs and serial peripheral interface (SPI).
36 Thornwood Dr. - Ithaca, NY 14850 USA tel: 607-257-1080 - fax: 607-257-1146 - www.kionix.com - info@kionix.com
“Kionix” is a registered trademark of Kionix, Inc. Products described herein are protected by patents issued or pending. Information provided
in this document is believed to be accurate and reliable but is not guaranteed. Kionix does not assume responsibility for its use or distribution.
No license is granted by implication or otherwise under any patent or other rights of Kionix. Kionix reserves the right to change product
specifications or discontinue this product at any time without prior notice.
© Kionix 2012 All Rights Reserved
January 26, 2012 Rev. 2.3
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