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晶合集成获得栅极介质层发明专利，优化成熟制程工艺能力

发布时间：4小时前

类别：行业动态

阅读：1

摘要：

【专利快讯】国家知识产权局公开最新授权专利信息，合肥晶合集成电路一项栅极介质层制备方法专利正式获得授权，专利聚焦成熟晶圆制造工艺，改善半导体器件栅介质层均匀性，降低器件漏电风险。

该专利提出梯度氮氧栅介质制备方案，可以有效阻挡氮元素向硅衬底扩散，提升整片晶圆的工艺一致性。成熟制程芯片广泛应用于显示驱动、电源管理、物联网 MCU 等产品，是国内半导体产业链需求量最大的板块。成熟工艺并非代表技术简单，器件良率、稳定性、一致性优化，需要大量工艺专利积累。

近几年国内晶圆厂持续加大工艺研发投入，专利产出数量稳步提升，大量创新集中在成熟制程改良、特色工艺开发方向。AI 算力、汽车电子拉动下游各类芯片订单上涨，成熟工艺产线稼动率维持高位。

行业人士表示，先进制程备受市场关注，但海量的终端产品依旧依赖成熟特色工艺，相关工艺专利积累，是保障供应链稳定、产品品质的重要基础，也是芯片产业不可忽视的技术护城河。

HBM4持续供不应求，SK海力士导入多元先进封装技术

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